Semiconductor laser diode arrangement and method of making same

Details Semiconductor laser diode arrangement and method of making same Semiconductor laser diode arrangement and method of making same

1990-10-09

1992-03-31

Healy, Brian

Optical waveguides

Integrated optical circuit

385 33, 385132, 156643, 372 99, 437 20, 437 27, 437 51, G02B 632, B44C 122, H01S 308, H01L 2170

Patent

active

051002205

ABSTRACT:
A semiconductor device, formed on a wafer, comprises an array of laser diodes, each emitting a beam parallel to the wafer surface and, integrated with the array, individually tilted deflecting mirrors forming an array of virtual sources. The virtual sources are spaced more closely together than the physical separation of the laser diodes and can even be coincident, thereby reducing the apparent spacing between the beam origins. The reflected beams are substantially perpendicular to the wafer providing a "surface-emitting" device. The required deflector configuration can be fabricated using a single undirectional process, the mirror positions and orientations being determined by proper segment geometry of the etch-mask.

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