Semiconductor laser diode and its fabrication process

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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Reexamination Certificate

active

07746910

ABSTRACT:
A semiconductor laser diode device with small driving current and no distortion in the projected image. The semiconductor laser diode includes an n-GaAs substrate and, an n-cladding layer on the n-GaAs substrate, an active layer, a p-clad layer, a multilayer formed from sequentially laminated p-contact layers, and a ridge formed by selectively etching from the upper surface of the p-contact active layer to a specified depth on the p-contact layer, and an insulating film deposited on the upper surface side of the n-GaAs substrate, and formed from the side surface of the ridge to the edge periphery of the n-GaAs substrate, and a p-electrode formed on the insulating layer deposited on the ridge of the P-contact layer, and an n-type electrode formed on the lower surface of the n-GaAs substrate; and the n-GaAs substrate structure possesses a side edge serving as an absorption layer to absorb light emitted at the active layer wavelength; and a groove is fabricated at the side edge forming the front facet (forward emission side), to a depth from the p-cladding layer exceeding the active layer, from a p-cladding layer section a specified distance away from the side of the ridge along the edge, to the side of the active layer; and the groove is covered by the insulating layer.

REFERENCES:
patent: 4730327 (1988-03-01), Gordon
patent: 4956682 (1990-09-01), Ohnaka et al.
patent: 5208821 (1993-05-01), Berger et al.
patent: 5276699 (1994-01-01), Kahen
patent: 2001/0021209 (2001-09-01), Onishi
patent: 2003/0076864 (2003-04-01), Sai et al.
patent: 2002-353566 (2002-12-01), None
patent: 2006-165407 (2006-06-01), None
patent: WO 02/101894 (2002-12-01), None

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