Semiconductor laser and manufacturing method of the same

Fishing – trapping – and vermin destroying

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437110, 437126, 437127, 437133, 117102, 117953, H01L 2120

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active

054967678

ABSTRACT:
A semiconductor laser comprises an optical wave guide layer including an AlGaInP active layer and AlGaInP optical confinement layers holding the active layer therebetween. A well structure of an energy band is formed and a compressive stress is applied to the activation layer by the difference between the compositions of the activation layer and the optical confinement layers. Since the compressive stress is applied to the activation layer, the oscillation threshold is lower than that of an un-strained device. Accordingly, the rise of the oscillation threshold due to the addition of Al is compensated and continuous oscillation at room temperature is attained and visible light having a wavelength of 0.67 .mu.m or lower, which has been difficult to attain in the past, is produce. The semiconductor laser having a multi-quantum well structure is manufactured by using AlGaInP or GaInP as a semiconductor material of the multi-quantum well structure and epitaxially growing by periodically changing a supply rate of only In. Through a very simple method of periodically changing the supply rate of only In, a well layer having a compressive stress applied thereto and a barrier layer having a tensile stress applied thereto are alternately grown and the activation layer having the desired strained multi-quantum well structure is produced.

REFERENCES:
patent: 5034957 (1991-07-01), Ohba et al.
Ludowise in "MOCVD of III-V semiconductors" in Jr. Appl. Phys. 58(8), Oct. 1985, pp. R31-R55.
Yablonovitch et al., Reductio of Lasing Threshold Current Density by the Lowering of Valence Band Effective Mass, Journal of Lightwave Technology, vol. LT-4, No. 5, May 1986, pp. 504-506.
T. Katsuyama et al., Very Low Threshold Current AlGalnP/Ga.sub.x In.sub.1-x P Strained Single Quantum Well Visible Laser Diode, Electronics Letters, vol. 26, No. 17, Aug. 16th 1990, pp. 1375-1377.
Kawata et al., Room-Temperature, Continuous-Wave Operation For Mode-Stabilised AlGalnP Visible-Light Semiconductor Laser With A Multiquantum-Well Active Layer, Electronics Letters, vol. 24, No. 24, Nov. 24th 1988, pp. 1409-1490.
Nam et al., Short-wavelength (.about.625 nm) room-temperature continuous laser operation of In.sub.0.5 (Al.sub.x Ga.sub.1-x).sub.0.5 P quantum well heterostructures, American Institute of Physics 1988, Appl Phys Lett 52 (16), Apr. 18, 1988 pp. 1329-1331.
Fletcher et al., CW room temperature operation (<640 nm) of AlGaInP multi-quantum-weil lasers, Inst. Phys. Conf. Ser. No. 96: Chapter 8, 1989 IOP Publishing Ltd., pp. 563-566.

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