Semiconductor ion emitter for mass spectrometry

Radiant energy – Ion generation – Field ionization type

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313345, 428607, 428620, 428664, 428672, H01J 2700

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043013694

ABSTRACT:
A semiconductor ion emitter for a mass spectrometer, comprises an electrode having semiconductor whiskers provided on the conductive surface of a base. A process for manufacturing such semiconductor ion emitter, includes steps of evaporating gold onto a wire having a diameter of about 60 .mu.m, preheating the coated wire, and supplying a gas containing the semiconductor for growth of the whiskers on the gold plated wire. An apparatus for such process comprises a vacuum vessel for enclosing the wire, means for controllably heating the wire and means for controllably supplying a gas containing the semiconductor into the vacuum vessel.

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Beckey, H. D. et al., Journal of Physics E, vol. 6, Gr. Britain, 1973, pp. 1043, 1044.

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