Semiconductor integrated circuit with implanted resistor element

Electrical transmission or interconnection systems – Nonlinear reactor systems – Parametrons

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357 23, 357 71, 307303, 307238, H01L 2904, H01L 2978, H01L 2348

Patent

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042097169

ABSTRACT:
Integrated circuit resistor elements ideally suited for load devices in static MOS RAM cells are made in second-level polycrystalline silicon by an ion implant step compatible with a self-aligned N-channel silicon-gate process. The cell size is reduced as the resistors can overly the first-level poly or MOS transistors. The second-level poly does not form transistor gates, so it is less critical, and an efficient layout provides a very small cell area.

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