Semiconductor integrated circuit having a logic verifying struct

Details Semiconductor integrated circuit having a logic verifying struct Semiconductor integrated circuit having a logic verifying struct

1998-02-27

2000-11-07

Meier, Stephen D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

H01L 2980

Patent

active

061440841

ABSTRACT:
A semiconductor integrated circuit having a logic verification structure includes a logic circuit formed by CMOS structure on a semiconductor substrate, in which the semiconductor integrated circuit has an impurity region irradiated by a laser beam from a back of the semiconductor substrate, for testing the logic circuit, achieving a simple logic analysis.

REFERENCES:
patent: 5329139 (1994-07-01), Sanada
patent: 5804847 (1998-09-01), Robinson
patent: 5841126 (1998-11-01), Fossum et al.
Henley, "Logic Failure Analysis Of CMOS VLSI Using A Laser Probe", IEEE Proceedings of the International Reliability Physics Symposium, pp. 69-75.
Ueda et al., "Back-Side OBIC Scanner", LSI Testing Symposium, pp. 164-169, (1996).

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