Semiconductor integrated circuit device with multi-level wiring

Details Semiconductor integrated circuit device with multi-level wiring Semiconductor integrated circuit device with multi-level wiring

1990-12-26

1992-11-17

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437195, 437228, H01L 2144

Patent

active

051643340

ABSTRACT:
In a multi-level wiring structure of an IC device, an intermediate insulating layer on a portion of a field insulating layer where wiring layers are absent thereabove is selectively removed so that a gas gap is formed between lower wiring layers.

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patent: 5017506 (1991-05-01), Shen et al.
patent: 5019527 (1991-05-01), Oshima et al.
patent: 5114879 (1992-05-01), Madan

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