Semiconductor integrated circuit device with digital circuit and

Details Semiconductor integrated circuit device with digital circuit and Semiconductor integrated circuit device with digital circuit and

1997-06-27

2000-05-02

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257370, 257378, 257501, 257548, H01L 2976, H01L 2900, H01L 2994

Patent

active

060575883

ABSTRACT:
A semiconductor layer is formed on a semiconductor substrate. A digital circuit region, in which a digital circuit is formed, and an analog circuit region, in which an analog circuit is formed, are separately formed by an isolation region at the surface of the semiconductor layer. At this time, a width of the semiconductor layer in the isolation region is greater than a thickness of the semiconductor substrate. Also, a region having high electrical resistance with low concentration of impurity is formed at the surface of the semiconductor substrate in the isolation region. Furthermore, conductive layers connected to a grounding potential is formed on the backside of the semiconductor substrate in the digital circuit region and on the backside of the semiconductor substrate of the analog region.

REFERENCES:
patent: 4246594 (1981-01-01), Mori
patent: 5091760 (1992-02-01), Maeda et al.
patent: 5317183 (1994-05-01), Hoffman et al.
patent: 5459349 (1995-10-01), Kobatake
patent: 5525824 (1996-06-01), Himi et al.
patent: 5623159 (1997-04-01), Monk et al.
Patent Abstracts of Japan, JP-02 271567, Nov. 1990.
Patent Abstracts of Japan, JP-06 053311, Feb. 1994.

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