Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate
2007-02-06
2007-02-06
Wilczewski, M. (Department: 2822)
Semiconductor device manufacturing: process
Miscellaneous
C438S909000, C438S758000, C206S712000, C134S001300
Reexamination Certificate
active
10932237
ABSTRACT:
A sealed type container accommodating a semiconductor substrate is positioned to a load port of a semiconductor manufacturing apparatus. The semiconductor substrate is taken out of the container. An ionizer is used for static-charge-eliminating the semiconductor substrates before and after process treatment in a transport area between the load port and a treatment section. The static-charge-eliminated semiconductor substrate is accommodated in the container positioned to the load port. Thus, it is possible to decrease foreign materials adhering to the semiconductor substrate and errors in handling the semiconductor substrate.
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Antonelli, Terry Stout and Kraus, LLP.
Barnes Seth
Renesas Technology Corp.
Wilczewski M.
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