Semiconductor integrated circuit device including element for mo

Details Semiconductor integrated circuit device including element for mo Semiconductor integrated circuit device including element for mo

1979-09-07

1981-08-11

James, Andrew J.

357 65, 357 67, 357 59, 357 51, 357 35, 357 36, H01L 2348, H01L 2944, H01L 2952

Patent

active

042837332

ABSTRACT:
A semiconductor device includes terminals for use in monitoring characteristics of circuit elements formed therein. The terminals are formed of a layer of polycrystalline silicon and terminate in an enlarged area pad portion adapted to be contacted by a probe of an external characteristics-monitoring apparatus.

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