Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Insulative housing or support
Patent
1994-12-30
1997-04-01
Picardat, Kevin
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Insulative housing or support
22818022, 29840, 438126, H01L 2160
Patent
active
056165200
ABSTRACT:
A semiconductor device is fabricated by forming first metal balls on electrode pads of a semiconductor chip. The first metal balls each can have a sharp tipped anchor. All of the anchors simultaneously flattened slightly only to the extent of equalizing the height thereof. The first metal balls are bonded to electrodes formed on a substrate with wirings by embedding the anchors into the electrodes. Alternatively, second metal balls can be formed on the electrodes which are then flattened to equalize the height thereof. The first metal balls, either with or without the anchors, are bonded to the second metal balls. The first and second metal balls are preferably heated during the bonding step to soften the second metal balls.
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Kamada Chiyoshi
Nakazato Norio
Nishiuma Masahiko
Suwa Motoo
Takahashi Hiroyuki
Hitachi , Ltd.
Hitachi VLSI Engineering Corp.
Picardat Kevin
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