Semiconductor integrated circuit arrangement device and method

Details Semiconductor integrated circuit arrangement device and method Semiconductor integrated circuit arrangement device and method

2005-08-16

2009-02-17

Glick, Edward J (Department: 2882)

X-ray or gamma ray systems or devices

Accessory

Alignment

C378S034000, C378S063000, C378S206000

Reexamination Certificate

active

07490985

ABSTRACT:
An arrangement device including: a photography section, which photographs a first mark and a second mark in a state in which a semiconductor integrated circuit to which the first mark is applied and a member to which the second mark is applied, which member is to be used in combination with the semiconductor integrated circuit, overlap; and a movement section, which relatively moves at least one of the semiconductor integrated circuit and the member with respect to the other thereof on the basis of positions of the first mark and the second mark which have been photographed by the photography section.

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