Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1998-04-13
2000-03-28
Ballato, Josie
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324754, 324758, 324760, G01R 3126
Patent
active
060436719
ABSTRACT:
A semiconductor inspection device and a method of controlling the same are obtained which are capable of preventing any positional displacement of a probe needle of the semiconductor inspection device relative to an electrode of a semiconductor device to be inspected and thus ensuring that the semiconductor device is inspected. The semiconductor inspection device provided with a probe needle for a probe card and a guide plate for positioning the probe needle employs a temperature sensor provided on the probe needle positioning guide plate, a heater for heating the positioning guide plate and a cooling fan for cooling the positioning guide plate and refers to the temperature of the positioning guide plate measured by the temperature sensor to provide ON/OFF control of the heater and the cooling fan by means of a control device.
REFERENCES:
patent: 5124639 (1992-06-01), Carlin et al.
patent: 5210485 (1993-05-01), Kreiger et al.
patent: 5325052 (1994-06-01), Yamashita
Ballato Josie
Mitsubishi Denki & Kabushiki Kaisha
Sundaram T. R.
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