Semiconductor inspection apparatus

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C345S156000, C345S960000

Reexamination Certificate

active

07916926

ABSTRACT:
An inspected image can be communicated without putting large load on a network. A remote console enables an operation screen and a moving image to be displayed and processed without color shifts. Information on the operation screen is not communicated as bitmap information, but event information such as a formation of a window and the moving of a mouse is communicated as information at a level of I parts of graphical user interface. Moreover, communication of the event information on the operation screen and communication of a moving image are separated. In addition, a method of compressing information on the operation screen and a method of compressing information on the moving image are separated. A necessary part of information on the moving image is selected and communicated depending on the state of the semiconductor inspection apparatus, an operation of an operator, and a pattern to be inspected.

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Office Action dated Dec. 8, 2009 in Japanese Patent Application No. 2005-200668.
Office Action in Japanese Patent Application No. 2005-200668 dated Mar. 16, 2010.

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