Semiconductor IC and method of making the same

Details Semiconductor IC and method of making the same Semiconductor IC and method of making the same

1986-05-28

1988-03-29

Kittle, John E.

Radiation imagery chemistry: process, composition, or product th

Holographic process, composition, or product

430311, 430313, 430326, 430327, 430328, 430394, G03H 104

Patent

active

047343451

ABSTRACT:
A method and apparatus for making a semiconductor device involves placing a semiconductor wafer in a position where two coherent light beams can interfere thereon. One of the coherent light beams is modulated by a hologram inserted in the path of the beam projected onto a surface of the semiconductor wafer. The other of the coherent light beams is also projected onto the same surface of the semiconductor wafer. The two interfering light beams form a pattern on a photoresist film found on the surface of the semiconductor wafer, which can be developed by photoresist techniques.

REFERENCES:
patent: 3658526 (1972-04-01), Haugh
patent: 4343874 (1982-08-01), Haines

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