Semiconductor heterointerface optical waveguide

Details Semiconductor heterointerface optical waveguide Semiconductor heterointerface optical waveguide

1987-05-11

1988-06-14

Edlow, Martin H.

357 30, H01L 29161

Patent

active

047515554

ABSTRACT:
Low loss semiconductor waveguides for supporting propagation of optical signals over a wide range of wavelengths are achieved by growing at least two epitaxial layers of dopant material contiguous along a major surface of each layer to form a heterointerface therebetween. At least one of the epitaxial layers includes a sufficient concentration of semiconductor material to cause strain via lattice mismatch substantially at and near the heterointerface. The strain induces a change in refractive index such that the heterointerface exhibits a substantially higher refractive index than a portion of each epitaxial layer proximate to the heterointerface. The resulting waveguide is capable of supporting propagation of optical signals substantially along the heterointerface. In one example, contiguous epitaxial layers of InP and InGaP form a waveguide for optical signals at wavelengths greater than 0.93 .mu.m. The concentration of Ga in the InGaP epitaxial layer is varied from 10.sup.18 to 10.sup.20 cm.sup.-3 to increase the refractive index difference between the heterointerface and the immediate surrounding layers.

REFERENCES:
patent: 4323911 (1982-04-01), Campbell
patent: 4390889 (1983-06-01), Capasso
patent: 4546479 (1985-10-01), Ishikawa
patent: 4625226 (1986-11-01), Antell
patent: 4631566 (1986-12-01), Campbell

Affiliated with

Also associated with

Rating

Semiconductor heterointerface optical waveguide does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor heterointerface optical waveguide, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor heterointerface optical waveguide will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-508119