Semiconductor hetero-interface photodetector

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

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438 91, 438 94, 438455, H01L 2170

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active

060748923

ABSTRACT:
By using wafer fusion, various structures for photodetectors and photodetectors integrated with other electronics can be achieved. The use of silicon as a multiplication region and III-V compounds as an absorption region create photodetectors that are highly efficient and tailored to specific applications. Devices responsive to different regions of the optical spectrum, or that have higher efficiencies are created.

REFERENCES:
patent: 4656494 (1987-04-01), Kobayashi et al.
patent: 4729963 (1988-03-01), Tabatabaie
patent: 4761383 (1988-08-01), Matsushima et al.
patent: 4839706 (1989-06-01), Brennan
patent: 4876209 (1989-10-01), Forrest
patent: 4914494 (1990-04-01), Webb
patent: 4992386 (1991-02-01), Furuyama et al.
patent: 5023685 (1991-06-01), Bethea et al.
patent: 5144637 (1992-09-01), Koch et al.
patent: 5236547 (1993-08-01), TakaHashi et al.
patent: 5262347 (1993-11-01), Sands
patent: 5286671 (1994-02-01), Kurtz et al.
patent: 5315128 (1994-05-01), Hunt et al.
patent: 5346848 (1994-09-01), Grupen-Shemansky et al.
patent: 5356509 (1994-10-01), Terranova et al.
patent: 5376580 (1994-12-01), Kish et al.
patent: 5385632 (1995-01-01), Goossen
patent: 5386137 (1995-01-01), Dell et al.
patent: 5389797 (1995-02-01), Bryan et al.
patent: 5393711 (1995-02-01), Biallas et al.
patent: 5407856 (1995-04-01), Quenzer et al.
patent: 5452118 (1995-09-01), Maruska
patent: 5527732 (1996-06-01), Kasahara et al.
patent: 5573975 (1996-11-01), Cunningham et al.
patent: 5654583 (1997-08-01), Okuno et al.
patent: 5767507 (1998-07-01), Unlu et al.
Ackley et al., "In.sub.0.53 Ga.sub.0.47 As/InP Floating Guard Ring Avalanche Photodiodes Fabricated by Double Diffusion", IEEE Photonics Technology Letters, vol. 2, No. 8, (1990).
Webb et al., "Properties of Avalanche Photodiodes", RCA Review, vol. 35, pp. 234-279, (1974).
Emmons, "Avalanche-Photodiode Frequency Response", Journal of Applied Physics, 38, No. 9, pp. 3705-3714 (1967).
Capasso, "Physics of Avalanche Photodetectors", Semiconductos and Semimetals, vol. 22, pp. 1-172, Academic Press, New York (1985).
Lo et al., "Semiconductor lasers on Si substrates using the technology of bonding by atomic rearrangement" Appl. Phys. Lett., 62, pp. 1038-1040 (1993).
Mori et al., "High-quality InGaAs/InP multi-quantum-well structures on Si fabricated by direct bonding", Electron. Lett., 30, pp. 1008-1009.
Grant, "Electron and Hole Ionization Rates in Epitaxial Silicon at High Electric Fields", Solid-State Electronics, 16, pp. 1189-1203 (1973).
Cook, et al., "Electron and hole impact ionization coefficients in InP determined by Photomultiplication measurements", Appl. Phys. Lett., 40, No. 7, pp. 589-591 (1982).
Law et al., "Interband Scattering Effects on Secondary Ionization Coefficients in GaAs", Solid-State Electronics, 21, pp. 331-340 (1978).
Pearsall, "Impact ionization rates for electrons and holes in Ga.sub.0.47 In.sub.0.53 As," Applied Physics Letters, 36, pp. 218-220, (1980).
Smith et al., "Sensitivity of Avalanche Photodetector Receivers for Long-Wavelength Optical Communications," The Bell System Technical Journal, 61, No. 10, pp. 2929-2946 (1982).
Campbell, "Heterojunction Photodetectors for Optical Communications", Heterostructures and Quantum Devices, pp. 243-271, Academic Press, New York (1994).
Littlejohn et al., "High-field transport in InGaAs and related heterostructures," Properties of Lattice-Matched and Strained Indium Gallium Arsenide, pp. 107-116, Inspec, London, (1993).

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