Stock material or miscellaneous articles – Composite – Of metal
Reexamination Certificate
2008-07-29
2008-07-29
Speer, Timothy M (Department: 1794)
Stock material or miscellaneous articles
Composite
Of metal
C428S469000, C428S698000, C428S662000, C428S671000
Reexamination Certificate
active
10396341
ABSTRACT:
A method of electroplating metal onto a low conductivity layer combines a potential or current reversal waveform with variation in the amplitude and duration of the applied potential or current pulse. The method includes, over time, varying the duration of the pulse and continuously decreasing the amplitude of both the cathodic and anodic portions of the waveform across the surface of the low conductivity layer as the deposition zone moves from the center of the surface of the low conductivity layer to the outside edge. By virtue of the ability to vary the amplitude and duration of the pulse, the method facilitates the filling of structures in the center of the low conductivity layer without overdepositing on the outside edge, thus ensuring a controlled deposition of material across the surface of the low conductivity layer.
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patent: 6071398 (2000-06-01), Martin et al.
patent: 6096648 (2000-08-01), Lopatin et al.
patent: 6197688 (2001-03-01), Simpson
patent: 6376374 (2002-04-01), Stevens
“Pulsed Electrodeposition of Copper Metallization from an Alkaline Bath,” Electrochemical Society Proceedings vol. 98-6, Krishnamoorthy et al., pp. 185-194, (1999).
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