Semiconductor handling device having a self-check function and m

Details Semiconductor handling device having a self-check function and m Semiconductor handling device having a self-check function and m

1991-02-21

1993-05-11

Noland, Tom

Measuring and testing

Testing of apparatus

73 1R, 414222, 414DIG1, G01M 1900, G01D 1800, B65H 4304

Patent

active

052091325

ABSTRACT:
A semiconductor handling device having a self-check mechanism comprising a product placement area in which a plurality of products are placed, a standard sample holding area for holding a standard sample, a tester for testing a product or the standard sample, and checking the characteristic thereof, a transfer robot for transferring the product or the standard sample between the product area or the standard sample holding area and the tester, and controller for causing the tester to test the standard sample when a testing operation starts or when the tester continuously determines that products are articles of inferior quality.

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patent: 4624564 (1986-11-01), Dahlgren
patent: 4996658 (1991-02-01), Baker
patent: 5058443 (1991-10-01), Reidmair

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