Semiconductor handler interface auto alignment

Details Semiconductor handler interface auto alignment Semiconductor handler interface auto alignment

2006-05-23

2006-05-23

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

C250S548000

Reexamination Certificate

active

07049577

ABSTRACT:
A test cell for use in a semiconductor manufacturing operation allowing alignment of semiconductor devices to be tested to a test station. The test cell is well suited for testing semiconductor devices on carrier strips. To aid in alignment, the test cell includes a down-ward looking camera and a simple upward looking sensor. Fiducials are acurately positioned relative to the test site, which are easily detected by the simple sensor. A controller within the test cell uses the output of the camera and the sensor, in conjunction with position sensors on a robotic assembly, to determine relative positions of the devices to be tested and the test station and issue the appropriate commands to align the devices to the test station.

REFERENCES:
patent: 4962318 (1990-10-01), Nishi
patent: 5739525 (1998-04-01), Greve

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