Semiconductor gas sensor having thermally isolated site

Details Semiconductor gas sensor having thermally isolated site Semiconductor gas sensor having thermally isolated site

1985-12-13

1987-11-17

Myracle, Jerry W.

Measuring and testing

Gas analysis

Gas chromatography

340634, 422 98, G01N 2706

Patent

active

047064935

ABSTRACT:
A preferred semiconductor gas sensor of this invention features a gas interaction site comprising a gas sensitive semiconductor thin film and means for heating the film to an operative temperature. The thin film and heating means are carried upon a region of a substrate that is etched opposite the site to reduce the thickness of the region and thereby reduce heat flow from the region into a surrounding region.

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patent: 4580439 (1986-04-01), Manaka
Lahiji, G. R., et al., A Batch-Fabricated Silicon Thermopile Infrared Detector, in IEEE Transactions on Electron Devices, vol. ED-29, No. 1, Jan. 1982, pp. 14-22.

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