Semiconductor fuse structure

Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Using structure alterable to nonconductive state

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438467, H01L 2182

Patent

active

057598770

ABSTRACT:
A semiconductor structure comprising a polysilicon pad, a metal pad separated from the polysilicon pad by an insulator, and a metal via connecting the pads. A fuse is formed at the intersection of the polysilicon pad and via.

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patent: 4651409 (1987-03-01), Ellsworth et al.
patent: 4692787 (1987-09-01), Possley et al.
patent: 4881114 (1989-11-01), Mohsen et al.
patent: 5081064 (1992-01-01), Inoue et al.

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