Semiconductor fuse device and method for forming a semiconductor

Ammunition and explosives – Igniting devices and systems – Electrical primer or ignitor

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F42B 313

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active

057984751

ABSTRACT:
A method for forming a semiconductor fuse device (23) having a fuse element (20) for an igniter device, comprises the steps of providing a semiconductor substrate (12), forming an insulator layer (14) on the semiconductor substrate, forming a single active layer (16) on the insulator layer, having a predetermined depth (18) of greater than 4 microns and patterning and etching the active layer to form the fuse element (20). Preferably, the forming a single active layer step includes the step of atomic bonding an active layer to the insulator layer.

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Excerpt from Introduction to Manufacturing Processes; John A. Schey; McGraw-Hill; chapter 10, 1987.

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