Illumination – Light source and modifier – Plural serial lens elements or components
Patent
1995-04-07
1998-08-11
Cariaso, Alan
Illumination
Light source and modifier
Plural serial lens elements or components
362263, 362295, 315291, F21V 2300
Patent
active
057917671
ABSTRACT:
A semiconductor exposure device having excellent throughput using a mercury lamp as an exposure light source. The mercury lamp is capable of providing an efficient i-ray output, with a small i-ray half width value, allowing correction of chromatic aberration. The semiconductor exposure device is further provided with an illumination optical system for illuminating a target surface and a projection optical system for projecting the image on the target surface. The illumination optical system is provided with the mercury lamp, an optical integrator, an optical system for guiding a flux of light emitted from the mercury lamp to the optical integrator and a condenser lens for converging the light from the optical integrator. The semiconductor exposure device is provided with a power source and an associated control circuit for supplying an electric current to the mercury lamp. The power source is configured to allow the mercury lamp to have an average electric field E satisfying the following relational expression with respect to the lamp input power W.sub.L (W), provided that the value obtained by deducting 11 V from the lamp voltage V.sub.L (V) of the mercury lamp and dividing the difference by the electrode-to-electrode distance d (mm) is the average electric field E (=V.sub.L -11/d) (V/mm):
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Ushio Discharge Lamps, product information from Ushio Denke. (no date).
Inoue Osamu
Kikuchi Tetsuo
Mori Takashi
Nakamura Kiyotada
Cariaso Alan
Nikon Corporation
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