Semiconductor element holding apparatus and semiconductor...

Work holders – With fluid means – Vacuum-type holding means

Reexamination Certificate

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C451S388000

Reexamination Certificate

active

11178467

ABSTRACT:
A semiconductor element holding apparatus includes a collet for suctioning a semiconductor element by negative pressure to hold the semiconductor element. The collet has a protrusion formed at the semiconductor element-holding surface thereof, and the protrusion is provided with a plurality of suction holes. The suction holes are opened to the semiconductor element-holding surface. The surface of the semiconductor element is held by the semiconductor element-holding surface of the protrusion of the collet.

REFERENCES:
patent: 5374829 (1994-12-01), Sakamoto et al.
patent: 5660380 (1997-08-01), Reis et al.
patent: 6036196 (2000-03-01), Freund et al.
patent: 6423102 (2002-07-01), Fukunaga et al.
patent: 2006/0049564 (2006-03-01), Tokudome
patent: 05-243375 (1993-09-01), None
patent: 05-326673 (1993-12-01), None

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