Semiconductor element and semiconductor element fabrication...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S774000, C257SE23001, C257SE21597, C438S667000

Reexamination Certificate

active

07994634

ABSTRACT:
A semiconductor element is provided that includes a semiconductor substrate, a circuit element disposed on the substrate, and a through-hole formed in the substrate having a stripe-like concavo-convex structure on its sidewall with stripes formed in the direction of the thickness of the semiconductor substrate.

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Japanese Office Action for Application No. JP 2009-051187, Feb. 23, 2010, Panasonic Corporation.
Japanese Office Action for Application No. JP 2009-051187, Aug. 24, 2010, Panasonic Corporation.
Chinese Office Action for Application No. 200910132440.1, Sep. 13, 2010, Panasonic Corporation.

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