Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Junction field effect transistor
Patent
1996-02-27
1996-11-26
Meier, Stephen
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Junction field effect transistor
257284, H01L 2980, H01L 31112
Patent
active
055788440
ABSTRACT:
There is provided a semiconductor element having a Schottky electrode which forms a Schottky junction with an active layer formed on a compound semiconductor substrate characterized in that a modified layer is formed in at least a portion of a region of the active layer on which region the Schottky electrode is formed and a vicinity of that region.
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Marukawa Takashi
Nakano Hiroyuki
Meier Stephen
Murata Manufacturing Co. Ltd.
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