Semiconductor element and process for manufacturing the same

Static information storage and retrieval – Read only systems – Semiconductive

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365103, 365 94, G11C 1700

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active

056847343

ABSTRACT:
A semiconductor memory element is disclosed which can share the terminals easily among a plurality of memory elements and can pass a high current and which is strong against the noises. In order to accomplish this a control electrode is formed to cover the entirety of thin film regions connecting low-resistance regions. As a result, the element can have a small size and can store information with high density. Thus, a highly integrated, low power consumption non-volatile memory device can be realized with reduced size.

REFERENCES:
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patent: 5387381 (1995-02-01), Takizawa et al.
S. Tiwari et al, "A Low Power 77 K Nano-Memory with Single Electron Nano-Crystal Storage", 53rd Annual Device Research Conference Digest, 1995, pp. 50-51.
T. Hashimoto et al, "An 8 nm-thick Polysilicon MOS Transistor and Its Thin Film Effects", 21st Conference on Solid State Devices and Materials, 1989, pp. 97-100.
K. Yano et al, "Room-Temperature Single-Electron Memory", IEEE Transactions on Electron Devices, vol. 41, No. 9, Sep. 1994, pp. 1628-1638.
Nikkei Electronics, No. 444, 1988, pp. 151-157.

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