Semiconductor dynamic quantity sensor

Details Semiconductor dynamic quantity sensor Semiconductor dynamic quantity sensor

2007-01-02

2007-01-02

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S514320, C073S514290, C073S504140

Reexamination Certificate

active

11253579

ABSTRACT:
A capacitance type semiconductor dynamic quantity sensor includes a substrate having a support layer and a semiconductor layer mounted on the support layer, a weight portion displaceable in a predetermined direction, movable electrodes joined to the weight portion so as to be displaceable integrally with the weight portion, fixed electrodes disposed so as to confront the movable electrodes and beam-shaped beam portions that are deformable elastically to displace the weight portion. When a dynamic quantity is applied, the distance between each movable electrode and each fixed electrode being varied, and the applied dynamic quantity being detected on the basis of the capacitance variation between both the electrodes which is caused by the variation of this distance. The thickness h2of the beam portion is set to be larger than the thickness h1of the movable electrode.

REFERENCES:
patent: 6318177 (2001-11-01), Buchan et al.
patent: 6906394 (2005-06-01), Muto et al.
patent: B2-2943477 (1993-10-01), None

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