Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2007-01-02
2007-01-02
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S514320, C073S514290, C073S504140
Reexamination Certificate
active
11253579
ABSTRACT:
A capacitance type semiconductor dynamic quantity sensor includes a substrate having a support layer and a semiconductor layer mounted on the support layer, a weight portion displaceable in a predetermined direction, movable electrodes joined to the weight portion so as to be displaceable integrally with the weight portion, fixed electrodes disposed so as to confront the movable electrodes and beam-shaped beam portions that are deformable elastically to displace the weight portion. When a dynamic quantity is applied, the distance between each movable electrode and each fixed electrode being varied, and the applied dynamic quantity being detected on the basis of the capacitance variation between both the electrodes which is caused by the variation of this distance. The thickness h2of the beam portion is set to be larger than the thickness h1of the movable electrode.
REFERENCES:
patent: 6318177 (2001-11-01), Buchan et al.
patent: 6906394 (2005-06-01), Muto et al.
patent: B2-2943477 (1993-10-01), None
Denso Corporation
Kwok Helen
Posz Law Group , PLC
LandOfFree
Semiconductor dynamic quantity sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor dynamic quantity sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor dynamic quantity sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3820630