Semiconductor dynamic quantity sensor

Details Semiconductor dynamic quantity sensor Semiconductor dynamic quantity sensor

2007-05-01

2007-05-01

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140, C073S514320, C073S514380

Reexamination Certificate

active

11075885

ABSTRACT:
A semiconductor dynamic quantity sensor includes moving parts displaceable in a predetermined direction over a supporting substrate and a beam portion for connecting said supporting substrate and said moving parts. The beam portion includes beams arranged in parallel and connected together at first end portions by a connecting portion. The beams bend in a direction perpendicular to the longitudinal direction of said beams. Outer side beams have an equal length and are fixed at other end portions to said supporting substrate. The moving parts are connected to the other end portion of another beam. The outer side beams and connecting portion have a parameter (A/B)/(T/L) equal to at least 20.

REFERENCES:
patent: 6308567 (2001-10-01), Higuchi et al.
patent: 6316796 (2001-11-01), Petersen et al.
patent: 6415663 (2002-07-01), Mochida et al.
patent: 6450033 (2002-09-01), Ito et al.
patent: 6796178 (2004-09-01), Jeong et al.
patent: 6807858 (2004-10-01), Orsier
patent: 6928872 (2005-08-01), Durante et al.
patent: A-2001-121500 (2001-05-01), None

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