Semiconductor dynamic quantity sensor

Details Semiconductor dynamic quantity sensor Semiconductor dynamic quantity sensor

2006-02-28

2006-02-28

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290, C073S504120

Reexamination Certificate

active

07004029

ABSTRACT:
In a semiconductor acceleration sensor (S1), above one side of a first silicon substrate (10) made of a semiconductor and serving as a fixed electrode (11), a moving electrode (20) made of a semiconductor and displaceable in the thickness direction of the first silicon substrate (10) is disposed apart from and facing the first silicon substrate (10). An applied acceleration is detected on the basis of capacitance changes between the moving electrode (20) and the face of the first silicon substrate (10) accompanying displacement of the moving electrode (20). A space and an electrically insulative insulating layer (13) having a relative permittivity larger than that of air are interposed between the moving electrode (20) and the face of the first silicon substrate (10), side by side in the direction in which the moving electrode (20) and the first silicon substrate (10) are apart.

REFERENCES:
patent: 5350189 (1994-09-01), Tsuchitani et al.
patent: 5417312 (1995-05-01), Tsuchitani et al.
patent: 5461916 (1995-10-01), Fujii et al.
patent: 5719336 (1998-02-01), Ando et al.
patent: 5747991 (1998-05-01), Ito et al.
patent: 6854330 (2005-02-01), Potter
patent: A-H09-113534 (1997-05-01), None
patent: A-H10-178184 (1998-06-01), None

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