Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Field effect device in non-single crystal – or...
Reexamination Certificate
2011-08-30
2011-08-30
Dickey, Thomas L (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Field effect device in non-single crystal, or...
C257SE27111, C349S043000
Reexamination Certificate
active
08008666
ABSTRACT:
It is an object of the present invention to provide a semiconductor display device having an interlayer insulating film which can obtain planarity of a surface while controlling film formation time, can control treatment time of heating treatment with an object of removing moisture, and can prevent moisture in the interlayer insulating film from being discharged to a film or an electrode adjacent to the interlayer insulating film. An inorganic insulating film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover a TFT. Next, an organic resin film containing photosensitive acrylic resin is applied to the organic insulting film, and the organic resin film is partially exposed to light to be opened. Thereafter, an inorganic insulting film containing nitrogen, which is less likely to transmit moisture compared with an organic resin, is formed so as to cover the opened organic resin film. Then, in the opening part of the organic resin film, a gate insulating film and the two layer inorganic insulating film containing nitrogen are opened partially by etching to expose an active layer of the TFT.
REFERENCES:
patent: 3597667 (1971-08-01), Horn
patent: 4313782 (1982-02-01), Sokoloski
patent: 4342617 (1982-08-01), Fu et al.
patent: 4347586 (1982-08-01), Natsui
patent: 4409724 (1983-10-01), Tasch et al.
patent: 4447272 (1984-05-01), Saks
patent: 4566175 (1986-01-01), Smayling et al.
patent: 4651406 (1987-03-01), Shimizu et al.
patent: 4808845 (1989-02-01), Suzuki et al.
patent: 4823180 (1989-04-01), Wieder et al.
patent: 4851370 (1989-07-01), Doklan et al.
patent: 4886962 (1989-12-01), Gofuku et al.
patent: 4951100 (1990-08-01), Parrillo
patent: 5055906 (1991-10-01), Mase et al.
patent: 5063378 (1991-11-01), Roach
patent: RE33829 (1992-02-01), Castleberry
patent: 5102813 (1992-04-01), Kobayashi et al.
patent: 5113511 (1992-05-01), Nelson et al.
patent: 5142344 (1992-08-01), Yamazaki
patent: 5169792 (1992-12-01), Katoh et al.
patent: 5182620 (1993-01-01), Shimada et al.
patent: 5191373 (1993-03-01), Nakano
patent: 5198685 (1993-03-01), Kitani et al.
patent: 5212119 (1993-05-01), Hah et al.
patent: 5247289 (1993-09-01), Matsueda
patent: 5292675 (1994-03-01), Codama
patent: 5292677 (1994-03-01), Dennison
patent: 5306651 (1994-04-01), Masumo et al.
patent: 5308998 (1994-05-01), Yamazaki et al.
patent: 5313076 (1994-05-01), Yamazaki et al.
patent: 5324974 (1994-06-01), Liao
patent: 5343066 (1994-08-01), Okamoto et al.
patent: 5359206 (1994-10-01), Yamamoto et al.
patent: 5365079 (1994-11-01), Kodaira et al.
patent: 5414278 (1995-05-01), Kobayashi et al.
patent: 5414442 (1995-05-01), Yamazaki et al.
patent: 5424752 (1995-06-01), Yamazaki et al.
patent: 5426315 (1995-06-01), Pfiester
patent: 5440163 (1995-08-01), Ohhashi
patent: 5444457 (1995-08-01), Hotto
patent: 5446562 (1995-08-01), Sato
patent: 5459596 (1995-10-01), Ueda et al.
patent: 5466617 (1995-11-01), Shannon
patent: 5468987 (1995-11-01), Yamazaki et al.
patent: 5476802 (1995-12-01), Yamazaki et al.
patent: 5479052 (1995-12-01), Yuuki
patent: 5485019 (1996-01-01), Yamazaki et al.
patent: 5497021 (1996-03-01), Tada
patent: 5498562 (1996-03-01), Dennison et al.
patent: 5499123 (1996-03-01), Mikoshiba
patent: 5504020 (1996-04-01), Aomori et al.
patent: 5504029 (1996-04-01), Murata et al.
patent: 5508209 (1996-04-01), Zhang et al.
patent: 5512779 (1996-04-01), Noda
patent: 5521107 (1996-05-01), Yamazaki et al.
patent: 5523257 (1996-06-01), Yamazaki et al.
patent: 5545577 (1996-08-01), Tada
patent: 5563427 (1996-10-01), Yudasaka et al.
patent: 5576231 (1996-11-01), Konuma et al.
patent: 5576655 (1996-11-01), Fujihira et al.
patent: 5580381 (1996-12-01), Yamagata
patent: 5583369 (1996-12-01), Yamazaki et al.
patent: 5585949 (1996-12-01), Yamazaki et al.
patent: 5585951 (1996-12-01), Noda et al.
patent: 5612254 (1997-03-01), Mu et al.
patent: 5619045 (1997-04-01), Konuma et al.
patent: 5620905 (1997-04-01), Konuma et al.
patent: 5623157 (1997-04-01), Miyazaki et al.
patent: 5627084 (1997-05-01), Yamazaki et al.
patent: 5635423 (1997-06-01), Huang et al.
patent: 5650338 (1997-07-01), Yamazaki et al.
patent: 5663077 (1997-09-01), Adachi et al.
patent: 5672900 (1997-09-01), Konuma et al.
patent: 5674771 (1997-10-01), Machida et al.
patent: 5680147 (1997-10-01), Yamazaki et al.
patent: 5696386 (1997-12-01), Yamazaki
patent: 5706064 (1998-01-01), Fukunaga et al.
patent: 5712495 (1998-01-01), Suzawa
patent: 5719065 (1998-02-01), Takemura et al.
patent: 5721601 (1998-02-01), Yamaji et al.
patent: 5729035 (1998-03-01), Anma
patent: 5733797 (1998-03-01), Yamaha
patent: 5737049 (1998-04-01), Shin et al.
patent: 5747355 (1998-05-01), Konuma et al.
patent: 5771110 (1998-06-01), Hirano et al.
patent: 5781254 (1998-07-01), Kim et al.
patent: 5784073 (1998-07-01), Yamazaki et al.
patent: 5786241 (1998-07-01), Shimada
patent: 5789762 (1998-08-01), Koyama et al.
patent: 5804878 (1998-09-01), Miyazaki et al.
patent: 5805252 (1998-09-01), Shimada et al.
patent: 5808315 (1998-09-01), Murakami et al.
patent: 5814529 (1998-09-01), Zhang
patent: 5815226 (1998-09-01), Yamazaki et al.
patent: 5818550 (1998-10-01), Kadota et al.
patent: 5831284 (1998-11-01), Park et al.
patent: 5847410 (1998-12-01), Nakajima
patent: 5849611 (1998-12-01), Yamazaki et al.
patent: 5879969 (1999-03-01), Yamazaki et al.
patent: 5880038 (1999-03-01), Yamazaki et al.
patent: 5893623 (1999-04-01), Muramatsu
patent: 5895937 (1999-04-01), Su et al.
patent: 5913112 (1999-06-01), Yamazaki et al.
patent: 5917225 (1999-06-01), Yamazaki et al.
patent: 5939731 (1999-08-01), Yamazaki et al.
patent: 5940732 (1999-08-01), Zhang
patent: 5945711 (1999-08-01), Takemura et al.
patent: 5946561 (1999-08-01), Yamazaki et al.
patent: 5956105 (1999-09-01), Yamazaki et al.
patent: 5962870 (1999-10-01), Yamazaki et al.
patent: 5962872 (1999-10-01), Zhang et al.
patent: 5982460 (1999-11-01), Zhang et al.
patent: 5990542 (1999-11-01), Yamazaki
patent: 6013928 (2000-01-01), Yamazaki et al.
patent: 6031290 (2000-02-01), Miyazaki et al.
patent: 6037712 (2000-03-01), Codama et al.
patent: 6057904 (2000-05-01), Kim et al.
patent: 6069443 (2000-05-01), Jones et al.
patent: 6078316 (2000-06-01), Page et al.
patent: 6115090 (2000-09-01), Yamazaki
patent: 6124904 (2000-09-01), Sato
patent: 6136624 (2000-10-01), Kemmochi et al.
patent: 6141066 (2000-10-01), Matsushima
patent: 6147375 (2000-11-01), Yamazaki et al.
patent: 6150692 (2000-11-01), Iwanaga et al.
patent: 6166414 (2000-12-01), Miyazaki et al.
patent: 6215154 (2001-04-01), Ishida et al.
patent: 6236106 (2001-05-01), Sato
patent: 6252297 (2001-06-01), Kemmochi et al.
patent: 6271066 (2001-08-01), Yamazaki et al.
patent: 6271543 (2001-08-01), Ohtani et al.
patent: 6274516 (2001-08-01), Kamei et al.
patent: 6274887 (2001-08-01), Yamazaki et al.
patent: 6294799 (2001-09-01), Yamazaki et al.
patent: 6303493 (2001-10-01), Lee
patent: 6306559 (2001-10-01), Tanamura et al.
patent: 6306694 (2001-10-01), Yamazaki et al.
patent: 6320224 (2001-11-01), Zhang
patent: 6335555 (2002-01-01), Takemura et al.
patent: 6346718 (2002-02-01), Yamanaka et al.
patent: 6356318 (2002-03-01), Kawahata
patent: 6372558 (2002-04-01), Yamanaka et al.
patent: 6429053 (2002-08-01), Yamazaki et al.
patent: 6448612 (2002-09-01), Miyazaki et al.
patent: 6451636 (2002-09-01), Segawa et al.
patent: 6475836 (2002-11-01), Suzawa et al.
patent: 6476447 (2002-11-01), Yamazaki et al.
patent: 6492659 (2002-12-01), Yamazaki et al.
patent: 6495920 (2002-12-01), Lee
patent: 6514855 (2003-02-01), Suzuki et al.
patent: 6515300 (2003-02-01), Boer et al.
patent: 6521913 (2003-02-01), Murade
patent: 6538301 (2003-03-01), Yamada et al.
patent: 6556257 (2003-04-01), Ino
patent: 6562672 (2003-05-01), Yamazaki et al.
patent: 6566711 (2003-05-01), Yamazaki et al.
patent: 6576926 (2003-06-01), Yamazaki et al.
patent: 6580475 (2003-06-01), Yamazaki et al.
patent: 6593990 (2003-07-01), Yamazaki
patent: 6599818 (2003-07-01), Dairiki
patent: 6605826 (2003-08-01), Yamazaki et al.
patent: 6608353 (2003-08-01), Miyazaki et al.
patent: 6614076 (2003-09-01), Kawasaki
Hayakawa Masahiko
Kato Kiyoshi
Murakami Satoshi
Osame Mitsuaki
Yamazaki Shunpei
Costellia Jeffrey L.
Dickey Thomas L
Erdem Fazli
Nixon & Peabody LLP
Semiconductor Energy Laboratory Co,. Ltd.
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