Semiconductor diffusion type force sensing apparatus

Details Semiconductor diffusion type force sensing apparatus Semiconductor diffusion type force sensing apparatus

1988-07-05

1989-11-28

Griffin, Donald A.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

357 26, G01L 122, H01L 2720

Patent

active

048840513

ABSTRACT:
A semiconductor diffusion type force sensing apparatus includes a plate-like semiconductor substrate formed by a single crystal material, and a plurality of sensing elements each constituted by a substantially rectangular impurity-diffused region formed in the semiconductor substrate. The sensing elements have an electric resistance variable in accordance with a deformation thereof due to an external force exerted on the semiconductor substrate. The sensing elements are arranged in a direction in which a longitudinal direction of each of the sensing elements coincides with a crystal orientation of the semiconductor substrate having an external value of a longitudinal piezoresistance coefficient of the impurity-diffused region.

REFERENCES:
patent: 4400681 (1983-08-01), Brown et al.
patent: 4439752 (1984-03-01), Starr
patent: 4672411 (1987-06-01), Shimizu et al.

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