Semiconductor diffusion strain gage

Electrical resistors – Strain gauge type

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296211, 338 5, G01L 122

Patent

active

048412724

ABSTRACT:
A strain gage wherein neutral impurity atoms forming neither donors nor acceptors are doped in a silicon substrate and a diffused resistance element is formed in the doped region, thereby decreasing the temperature coefficient of resistivity without changing the resistivity and decreasing the temperature coefficient of piezoresistance coefficient with no effect on the piezoresistance coefficient which governs the sensitivity of the strain gage.

REFERENCES:
patent: 4510671 (1985-04-01), Kurtz et al.

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