Electrical resistors – Strain gauge type
Patent
1987-08-26
1989-06-20
Goldberg, E. A.
Electrical resistors
Strain gauge type
296211, 338 5, G01L 122
Patent
active
048412724
ABSTRACT:
A strain gage wherein neutral impurity atoms forming neither donors nor acceptors are doped in a silicon substrate and a diffused resistance element is formed in the doped region, thereby decreasing the temperature coefficient of resistivity without changing the resistivity and decreasing the temperature coefficient of piezoresistance coefficient with no effect on the piezoresistance coefficient which governs the sensitivity of the strain gage.
REFERENCES:
patent: 4510671 (1985-04-01), Kurtz et al.
Nomiyama Mayumi
Yamagishi Hideaki
Goldberg E. A.
Kojima Moonray
Lateef M. M.
Yokogawa Electric Corporation
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