Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1997-07-10
1999-09-28
Patel, Harshad
Measuring and testing
Fluid pressure gauge
Diaphragm
73717, G01L 904, G01L 900
Patent
active
059592133
ABSTRACT:
A semiconductor differential pressure measuring device comprising two measurement diaphragms and two detection sensors provided in a semiconductor substrate using micromachining techniques, and a computing circuit which computes the differences between the two sensor outputs, wherein a communicating hole is provided for applying pressure to each diaphragm so that the diaphragms operate in opposite phases by differential pressure, and two detecting sensors are provided on each diaphragm for detecting displacement or strain of each diaphragm caused by the differential pressure applied to the respective diaphragm, whereby detecting the differences in displacement or strain cancels the static pressure error and temperature error so that the invention has excellent temperature and static pressure characteristics, and whereby the computing circuit comprises a bridge using the two detecting sensors, which substantially reduces the cost of the device.
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Fukuhara Satoshi
Ikeda Kyoichi
Tsukamoto Hideo
Watanabe Tetsuya
Yoshida Takashi
Clark Robin
Kojima Moonray
Patel Harshad
Yokogawa Electric Corporation
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