Semiconductor devices with oxide coatings selectively...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S638000, C257S758000

Reexamination Certificate

active

10454256

ABSTRACT:
A semiconductor device structure includes a passivation layer through which only non-silicon-comprising structures are exposed. The semiconductor device structure is formed by selectively forming the passivation layer on an exposed silicon-comprising surface by exposing surfaces of the semiconductor device to a liquid phase solution supersaturated in silicon dioxide. The exposure is conducted at substantially atmospheric temperature and pressure and achieves an effective passivation layer in an abbreviated time, and without subsequent heat treatment. A wafer that includes a back side coated with such a passivation layer may be subjected to a high-speed electroless process for plating the bond pad with a solder-enhancing material. The semiconductor device structure may also include via holes and microvia holes with walls that are passivated.

REFERENCES:
patent: 4599792 (1986-07-01), Cade et al.
patent: 5192714 (1993-03-01), Suguro et al.
patent: 5256593 (1993-10-01), Iwai
patent: 5365112 (1994-11-01), Oshima
patent: 5395645 (1995-03-01), Kodera et al.
patent: 5429956 (1995-07-01), Shell et al.
patent: 5516721 (1996-05-01), Galli et al.
patent: 5683946 (1997-11-01), Lu et al.
patent: 5776829 (1998-07-01), Homma et al.
patent: 6022814 (2000-02-01), Mikoshiba et al.
patent: 6045877 (2000-04-01), Gleason et al.
patent: 6130116 (2000-10-01), Smith et al.
patent: 6174824 (2001-01-01), Michael et al.
patent: 6197110 (2001-03-01), Lee et al.
patent: 6251753 (2001-06-01), Yeh et al.
patent: 6294832 (2001-09-01), Yeh et al.
patent: 6335224 (2002-01-01), Peterson et al.
patent: 6399494 (2002-06-01), Nagata
patent: 6671947 (2004-01-01), Bohr
Schreiber, S.J. et al., “Low Temperature Deposition of Microcrystalline Silicon For Thin Film Transistors,” CUED Electronic Devices and Materials Group, http://www2.eng.cam.ac.uk/˜www-edm/projects/lowtempdep/1.htm, prior to Sep. 2000, 2 pages.
Niskanen, Sampo, “Development of Liquid Phase Deposition of Zirconium Oxide and Comparison to Silicon Dioxide,” http://sampo.rdx.net/LPD/lpd.html, Nov. 19, 2000, 15 pages.
Niskanen, Antti J., “Liquid Phase Deposition of Silicon Dioxide,” http:://.../Liquid—Silicon—Dioxide.htm+liquid+phase+Silicon+Dioxide+deposition&hl=en&start=, prior to Nov. 2000, 2 pages.(Cache of http://www.hut.fi/Units/Electron/Projects2000/LiquidSiliconDioxide.htm).
Yeh, Ching-Fa et al., “Properties of Silicon Exide Prepared by Liquid-Phase Deposition,” Mar. 26, 1999, 1 page, http://www.aps.org/meet/CCNT99/BAPS/abs/S8880001.html).

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor devices with oxide coatings selectively... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor devices with oxide coatings selectively..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor devices with oxide coatings selectively... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3760395

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.