Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate
2006-06-27
2006-06-27
Ghyka, Alexander (Department: 2812)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Electromagnetic or particle radiation
C438S072000, C430S314000, C430S317000
Reexamination Certificate
active
07067894
ABSTRACT:
Techniques are disclosed for fabricating a device using a photolithographic process. The method includes providing a first anti-reflective coating over a surface of a substrate. A layer which is transparent to a wavelength of light used during the photolithographic process is provided over the first anti-reflective coating, and a photosensitive material is provided above the transparent layer. The photosensitive material is exposed to a source of radiation including the wavelength of light. Preferably, the first anti-reflective coating extends beneath substantially the entire transparent layer. The complex refractive index of the first anti-reflective coating can be selected to maximize the absorption at the first anti-reflective coating to reduce notching of the photosensitive material.
REFERENCES:
patent: 4722913 (1988-02-01), Miller
patent: 5488246 (1996-01-01), Hayashide et al.
patent: 5534462 (1996-07-01), Fiordalice et al.
patent: 5710067 (1998-01-01), Foote
patent: 5733712 (1998-03-01), Tanaka et al.
patent: 5741626 (1998-04-01), Jain et al.
patent: 5910021 (1999-06-01), Tabara
patent: 5932487 (1999-08-01), Lou
patent: 5981398 (1999-11-01), Tsai et al.
patent: 6051369 (2000-04-01), Azuma et al.
patent: 6103456 (2000-08-01), Tobben
patent: 6156485 (2000-12-01), Tang et al.
patent: 6187687 (2001-02-01), Plat et al.
patent: 6210856 (2001-04-01), Lin et al.
patent: 6268295 (2001-07-01), Ohta et al.
Sandhu Gurtej S.
Yin Zhiping
Dickstein , Shapiro, Morin & Oshinsky, LLP
Ghyka Alexander
LandOfFree
Semiconductor devices using anti-reflective coatings does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor devices using anti-reflective coatings, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor devices using anti-reflective coatings will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3660863