Semiconductor devices testing apparatus with...

Details Semiconductor devices testing apparatus with... Semiconductor devices testing apparatus with...

2009-03-11

2011-10-11

Nguyen, Vinh (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S750080, C324S750260

Reexamination Certificate

active

08035405

ABSTRACT:
A probing apparatus includes a housing, a device holder positioned in the housing and configured to receive a device under test, a temperature-controller positioned in the device holder, a platen positioned on the housing and configured to retain at least one probe, and a flow line positioned in the platen, wherein the flow line is configured to flow a fluid therein to adjust the temperature of the platen.

REFERENCES:
patent: 4820976 (1989-04-01), Brown
patent: 5325052 (1994-06-01), Yamashita
patent: 6468098 (2002-10-01), Eldridge
patent: 6906543 (2005-06-01), Lou et al.
patent: 7046025 (2006-05-01), Schneidewind et al.
patent: 7576553 (2009-08-01), Lou et al.
patent: 7791363 (2010-09-01), Lou

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