Semiconductor devices having improved alignment marks

Details Semiconductor devices having improved alignment marks Semiconductor devices having improved alignment marks

1980-04-04

1982-07-06

Larkins, William D.

357 55, 357 85, H01L 2176, H01L 2195

Patent

active

043386202

ABSTRACT:
A semiconductor device comprises a V-groove isolation structure and an alignment mark having a sharp contour. The alignment mark consists of a locally thick portion of an oxide layer covering an epitaxial layer in which a V-groove is formed. The alignment mark is produced by a thermal oxidizing operation involved in the manufacturing procedure of the V-groove isolation structure.

REFERENCES:
patent: 3623218 (1971-11-01), Mitari et al.
patent: 3624463 (1971-11-01), Davidsohn
patent: 3766438 (1973-10-01), Castrucci
patent: 3783044 (1974-01-01), Cheskis
patent: 3844858 (1974-10-01), Bean
patent: 3847687 (1974-11-01), Davidsohn
patent: 3975221 (1976-08-01), Rodgers
patent: 4037306 (1977-07-01), Gutteridge et al.
patent: 4187516 (1980-02-01), Legat et al.

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