Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Patent
1997-02-25
1999-11-23
Chaudhuri, Olik
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified configuration
257 48, 438 18, H01L 2348, H01L 2352, H01L 2940, H01L 2358
Patent
active
059905620
ABSTRACT:
Integrated circuits are provided which permit backside probing while being operated. Conductive trenches are fabricated into the surface of semiconductor chip at preselected locations. Access to specific electrically connected nodes of the integrated circuit can be effected through the conductive trenches by backside thinning and milling of the semiconductor chip followed by e-beam probe or mechanical probe usage.
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Chaudhuri Olik
International Business Machines - Corporation
Walter, Jr. Howard J.
Weiss Howard
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