Semiconductor device manufacturing: process – Making passive device – Trench capacitor
Reexamination Certificate
2007-05-01
2007-05-01
Owens, Douglas W. (Department: 2811)
Semiconductor device manufacturing: process
Making passive device
Trench capacitor
C438S243000
Reexamination Certificate
active
10960216
ABSTRACT:
Semiconductor devices having a capacitor and methods of manufacturing the same are disclosed. A disclosed semiconductor device includes a semiconductor substrate; a lower interconnection line on the substrate; an upper interconnection line electrically connected to a first portion of the lower interconnection line; a first metal layer electrically connected to a second portion of the lower interconnection line; a capacitor insulating layer on the first metal layer; and a second metal layer on the capacitor insulating layer, wherein the first metal layer, the capacitor insulating layer and the second metal layer form a capacitor
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Arena Andrew O
Dongbu Electronics Co. Ltd.
Fortney Andrew D.
Owens Douglas W.
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