Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Groove formation
Reexamination Certificate
2006-03-21
2010-10-12
Pham, Thanh V (Department: 2894)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Groove formation
C438S034000, C438S003000, C216S056000
Reexamination Certificate
active
07811846
ABSTRACT:
A method for fabricating an array of semiconductor devices comprising the steps of providing a non-metallic substrate, placing a layer of spheres on said substrate, reducing diameter of the spheres, encapsulating the spheres in a matrix of rigid material, finishing an upper surface of said matrix to expose a portion of said spheres, removing the spheres to form an array of cavities within said matrix, and forming features in said cavities in contact with said substrate so as to form the device.
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Chua Soo Jin
Wang Benzhong
Agency for Science Technology and Research
Cardona Victor A.
Heslin Rothenberg Farley & & Mesiti P.C.
Laurenzi, III Mark A
Pham Thanh V
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