Semiconductor devices and methods of manufacture thereof

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – With contact or lead

Reexamination Certificate

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C257S777000, C257SE21677, C257SE23011, C257SE21597, C438S107000, C438S109000, C438S244000, C438S387000, C438S455000, C438S459000, C438S667000

Reexamination Certificate

active

07626257

ABSTRACT:
Vertically stacked integrated circuits and methods of fabrication thereof are disclosed. Deep vias that provide vertical electrical connection for vertically stacked integrated circuits are formed early in the manufacturing process, before integrated circuits are bonded together to form a three dimensional integrated circuit (3D-IC).

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