Semiconductor device manufacturing: process – Gettering of substrate – By layers which are coated – contacted – or diffused
Reexamination Certificate
2006-11-29
2009-11-03
Ghyka, Alexander G (Department: 2812)
Semiconductor device manufacturing: process
Gettering of substrate
By layers which are coated, contacted, or diffused
C438S763000, C438S785000, C257SE21317, C257SE21318
Reexamination Certificate
active
07611972
ABSTRACT:
Semiconductor devices and methods of manufacture thereof are disclosed. A preferred embodiment comprises a method of forming an insulating material layer. The method includes forming a barrier layer and forming a rare earth element-containing material layer over the barrier layer.
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Ghyka Alexander G
Qimonda North America Corp.
Slater & Matsil L.L.P.
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