Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including high voltage or high power devices isolated from...
Reexamination Certificate
2006-04-18
2006-04-18
Quach, T. N. (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including high voltage or high power devices isolated from...
C257S510000
Reexamination Certificate
active
07030454
ABSTRACT:
Semiconductor devices and methods to form a trench in a semiconductor device are disclosed. A disclosed process comprises: forming a hollow by etching a portion of a semiconductor substrate; forming a side wall layer in an inner side wall of the hollow; forming a trench by further etching the semiconductor substrate exposed through the bottom of the hollow; and filling the trench by forming an insulation film on the side wall layer and the trench.
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DongbuAnam Semiconductor Inc.
Fortney Andrew D.
Quach T. N.
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