Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal
Reexamination Certificate
2006-11-20
2010-10-26
Tsai, H. Jey (Department: 2895)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
C438S024000, C438S057000, C438S455000, C257SE21517
Reexamination Certificate
active
07820461
ABSTRACT:
A method for making a semiconductor device with vertical electron injection, including: transferring a monocrystalline thin film onto a first face of a support substrate; producing at least one electronic component from the monocrystalline thin film; forming at least one recess in a second face of the substrate to enable electric or electronic access to the electronic component through the monocrystalline thin film; and producing a vertical electron injector configured to inject electrons into the electronic component.
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Baptist Robert
Letertre Fabrice
Commissariat a l''Energie Atomique
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tsai H. Jey
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