Semiconductor device with stress relief

Details Semiconductor device with stress relief Semiconductor device with stress relief

1994-04-11

1995-08-15

Limanek, Robert P.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257508, 257640, 257649, H01L 2706, H01L 2906

Patent

active

054422230

ABSTRACT:
An SOI-type semiconductor device in which electrical elements formed on one semiconductor substrate are isolated from each other by an insulating film and a shield layer, to ensure a stable operation of the electrical elements against electrical noise etc., and at the same time, a stress relief film is formed between the insulating film and the shield layer to ensure that an SOI layer is stabilized by being free from crystal defects. A process for producing same is also disclosed.

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"Denki Zairyo", and partial translation, Mar. 20, 1980.
Proceedings of ISPSD '88 (Aug., 1988).

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