Semiconductor device manufacturing: process – Making passive device
Reexamination Certificate
2005-10-04
2005-10-04
Flynn, Nathan J. (Department: 2826)
Semiconductor device manufacturing: process
Making passive device
C257S531000, C257S700000, C257S621000
Reexamination Certificate
active
06951794
ABSTRACT:
A spiral inductor comprising: a substrate; a protruding portion which is formed on the top face of the substrate and the top of which serves as a dummy element for controlling a chemical mechanical polishing process; and a conductive layer which is formed on the substrate so as to have a spiral shape and which serves as an induction element, wherein the protruding portion is formed in a region other than a region directly below the conductive layer.
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Flynn Nathan J.
Kabushiki Kaisha Toshiba
Mandala Jr. Victor A.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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