Semiconductor device with passivation layer of benzocyclobutene

Details Semiconductor device with passivation layer of benzocyclobutene Semiconductor device with passivation layer of benzocyclobutene

1995-10-26

1998-01-27

Meier, Stephen

Active solid-state devices (e.g., transistors, solid-state diode

With means to control surface effects

Insulating coating

257632, 257646, H01L 2358

Patent

active

057125066

ABSTRACT:
In a semiconductor device having a passivation layer, the passivation layer is made of benzocyclobutene polymer and silicon power.

REFERENCES:
patent: 5232970 (1993-08-01), Solc et al.
patent: 5288989 (1994-02-01), Ishaque et al.
patent: 5416233 (1995-05-01), DeVries et al.

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