Semiconductor device with InGaP channel layer

Active solid-state devices (e.g. – transistors – solid-state diode – Heterojunction device – Field effect transistor

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257201, 257280, H01L 310328, H01L 310336, H01L 31072, H01L 31109

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active

059456957

ABSTRACT:
A semiconductor device comprises a GaAs substrate 10; a buffer layer 12 formed on the GaAs substrate 10 and having a wider band gap than that of InGaP; a channel layer 14 formed on the buffer layer 12 and formed of an InGaP; a gate electrode 34 for controlling current of the channel layer 14. InGaP has a high carrier mobility and large .GAMMA.-L energy difference. Accordingly, the channel layer is formed of InGaP, whereby the semiconductor device which is operable at high speed and high voltage can be obtained.

REFERENCES:
patent: 5448086 (1995-09-01), Hida
patent: 5504353 (1996-04-01), Kuzuhara
patent: 5682040 (1997-10-01), Imanishi
patent: 5698868 (1997-12-01), Awano et al.
patent: 5751028 (1998-05-01), Kikkawa
patent: 5760427 (1998-06-01), Onda
"High Breakdown-Voltage Ga.sub.0.51 In.sub.0.49 P Channel MESFET's Grown by GSMBE", Yo-Sheng Lin and Shey-Shi Lu; IEE Electron Device Letters, vol. 17, No. 9, Sep. 1996.

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